JPH0326901B2 - - Google Patents

Info

Publication number
JPH0326901B2
JPH0326901B2 JP59256958A JP25695884A JPH0326901B2 JP H0326901 B2 JPH0326901 B2 JP H0326901B2 JP 59256958 A JP59256958 A JP 59256958A JP 25695884 A JP25695884 A JP 25695884A JP H0326901 B2 JPH0326901 B2 JP H0326901B2
Authority
JP
Japan
Prior art keywords
filter
grid
surface potential
scintillator
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59256958A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61135035A (ja
Inventor
Motosuke Myoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59256958A priority Critical patent/JPS61135035A/ja
Publication of JPS61135035A publication Critical patent/JPS61135035A/ja
Publication of JPH0326901B2 publication Critical patent/JPH0326901B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Current Or Voltage (AREA)
JP59256958A 1984-12-05 1984-12-05 電子ビ−ムテスタ用表面電位測定装置 Granted JPS61135035A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59256958A JPS61135035A (ja) 1984-12-05 1984-12-05 電子ビ−ムテスタ用表面電位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59256958A JPS61135035A (ja) 1984-12-05 1984-12-05 電子ビ−ムテスタ用表面電位測定装置

Publications (2)

Publication Number Publication Date
JPS61135035A JPS61135035A (ja) 1986-06-23
JPH0326901B2 true JPH0326901B2 (en]) 1991-04-12

Family

ID=17299728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59256958A Granted JPS61135035A (ja) 1984-12-05 1984-12-05 電子ビ−ムテスタ用表面電位測定装置

Country Status (1)

Country Link
JP (1) JPS61135035A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005010969D1 (de) * 2005-03-17 2008-12-24 Integrated Circuit Testing Teilchenstrahlgerät für hohe räumliche Auflösung und verschiedene für perspektivische Abbildungsmethoden
DE102006043895B9 (de) * 2006-09-19 2012-02-09 Carl Zeiss Nts Gmbh Elektronenmikroskop zum Inspizieren und Bearbeiten eines Objekts mit miniaturisierten Strukturen
EP2124245A1 (en) * 2008-05-21 2009-11-25 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Ultra high precision measurement tool

Also Published As

Publication number Publication date
JPS61135035A (ja) 1986-06-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term